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Si Fusion and Si Parts
Si Fusion and Si Parts Products

Ferrotec series products: Si Fusion Furnace ware and Precision Silicon Parts

Ferrotec (China) Si Fusionand Si Parts products provide ideal silicon furnace ware and silicon parts for etcher which helps improve metal contamination, reduce slip and particle. We focus on manufacturing silicon boats, pedestal and injectors for wafer high temperature process and LPCVD process. We also provide silicon focus rings and showerheads for etching process.
The Si Fusion products
The Si Fusion products are used for wafer annealing, RTP, CVD process, etc. The silicon boats have the same physical property of wafer, especial same hardness, CET and thermal conductivity, which help reduce slip, backside scratches by FerroTec’s proprietary design based how to solve customer’s current problems.
Long Finger Boat
Long Finger Boat
Designed for diffusion furnace processes, Si Fusion polysilicon boats represent a high-purity, high-performance replacement technology for existing quartz and silicon carbide fixtures. They are critical to the elimination of particles and crystallographic slip. Si Fusion boat is an essential tool for new IC architectures achieve better yield.
Short Finger Boat
Short Finger Boat
At the same time, we can produce auxiliary products such as injector, pedestal and inner tube for furnaces.
Horizontal Boat
Horizontal Boat
Injector
Injector
Pedestal
Pedestal
Baffle Wafer
Baffle Wafer
Silicon Parts
Ferrotec (China) precision silicon products use Wacker of Germany and Floatzone of REC semiconductor grade in the United States. They are manufactured into various types of silicon components, providing customers with more advantages in capacity utilization, production efficiency and output.
Focus Ring
Focus Ring
We mainly provides focus rings for wafers of 8 inch-12 inch. Focus rings of different sizes and surface requirements can be processed according to customer’s requirement. Focus rings are applied to dry etching process. We own the advantage of material cost, precision machining and cleaning capability and delivery time.
Showerhead
Showerhead
The main specifications are 8 inches and 12 inches. Different size holes can be drilled according to customer requirements. It is used for dry etching systems. We integrate the technology of silicon ingot pulling, precision machining and cleaning which enable us to provide high purity and particle-free showerhead with competitive price.
Other Silicon Machining Parts
Other Silicon Machining Parts
We can provide per customer’s requirement discs, silicon plates, seed rods and other products which are mainly used in special fields of semiconductor processes.

Silicon Ingots

Silicon Ingots

Single silicon ingots: We provide silicon ingots of diameters at 120-450mm with resistivity ranges at <0.1ohm-cm,1-5ohm-cm and 60-90ohm-cm.The main application for these materials are manufacturing etching parts like focus rings, showerhead and so on.
Data Download
精密硅制品樣冊
Download
Tel: 0571-88996352
Tel: 0571-88996352
Proprietary Technology
Proprietary Technology
Reduce Damage
Reduce Damage
Extend Lifetime
Extend Lifetime
Extend Cleaning Cycle
Extend Cleaning Cycle
Ferrotec precision silicon parts advantages
Using proprietary technology and ultra-pure Single/Polycrystalline silicon material; Reduce wafer backside scratch, reduce slip and particles; Effectively extend routine cleaning cycle(PM); Extend lifetime and improve the wafer yield.
Matrix diagram of applications in various fields
Semiconductor correlation
Si Fusion and Si Parts

Semiconductor process oxidation, annealing, CVD and other process equipment; 

Dry etching process equipment of semiconductor silicon wafer;

Wafer substrate production and silicon semiconductor equipment consumable manufacturing;

Production base
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