Founded Surface Treatment Division
Successfully developed and mass-produced 350nm line-width semiconductor PVD, CVD parts cleaning process and began to
develop semiconductor ETC parts cleaning process
Successfully developed and mass-produced 250nm line-width semiconductor PVD, CVD, ETC parts cleaning process. Established
an independent laboratory to develop more advanced cleaning process for semiconductors. Started research and development of
DIF and LIT parts cleaning process
Started cleaning of TFT parts, successfully developed and standardized the cleaning process of the machine parts of
semiconductor departments
Provided parts cleaning services for a number of semiconductor and TFT factories, and improved the cleaning process of TFT parts
Established the first subsidiary----- Ferrotec (Tianjin) Technology Co., Ltd
Successfully mass-produced cleaning technology of 45nm line width semiconductor process parts and 8.5 generation line TFT parts
Established the second subsidiary---- Ferrotec (Sichuan) Technology Co., Ltd., successfully developed and mass-produced 28nm
line width semiconductor process parts cleaning technology
The third subsidiary---- Ferrotec (Dalian) Technology Co., Ltd. formally put into production, research and development and
mass production of 10.5 generation LCD parts cleaning process; improved ceramic spray process and put into mass production,
started research and development the 6th generation OLED parts cleaning process, began to develop semiconductor 16nm
parts cleaning process
The prototype of the surface treatment analysis laboratory of Dalian Plant was established, and the high-tech equipment such
as ultrasonic tomography microscope, CMM, He detector, potentiometric titrator, LPC and ICP MS were put into operation.And
established high-purity quartz line
