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Ferrotec- The global leader in the sealing industry

Ferrofluidic Vacuum Feedthroughs is a solution for transferring rotary motion into vacuum container to eliminate gas leakage and pollution, which is suitable for strict sealing requirements. Nowadays, Vacuum Feedthroughs have been widely used in many devices which require free control of feeding, such as silicon growth, target position electronic indicators, sputtering, plasma etching, chemical vapor deposition, ion migration technology and liquid crystal regeneration. It helps reduce unnecessary downtime during the process, which has special significance.

Ferrofluidic Vacuum Feedthroughs

From semiconductor manufacturing to aerospace industry, Ferrotec's Ferrofluidic Vacuum Feedthroughs are globally recognized for good sealing performance in harsh environments. We are committed to providing diverse types of Ferrofluidic Seals, Vacuum Rotary Feedthroughs, integration of seal assembly and parts, and the ultimate rotary sealing solutions for vacuum environments.

Multi-shaft Seal Feedthroughs

Multi-shaft seal feedthroughs are mainly designed for robotic arms which are wildly applied into semiconductor processing and production industries. Ferrotec (China) also provides 10-8Torr ultra-high vacuum sealing devices.

Motor-Integrated Ferrofluidic Vacuum Feedthroughs

Ferrotec's Motor-Integrated Ferrofluidic Vacuum Feedthroughs combining a hermetic Ferrofluidic vacuum feedthrough with a high precision motor and controller to offer a compact and high-performance integrated sealed rotation system. This design eliminates the integration challenges and potential mechanical failure points when customers are connecting discrete components. Typical applications that coaxial drive motorized feedthroughs are used for include MOCVD, thin film, optical coating, ion beam deposition, ion beam etch, physical vapor deposition, Sputtering, ion implantation, and any other application where a motor is used, particularly where servo motor is necessary.

Hollow-shaft Seal Feedthroughs

Hollow-shaft Seal Feedthrough contains a clamp that connects the user shaft and the shaft of the sealing device through an O-ring. A typical application is sputtering equipment, inside which includes rotating unit for electron, neural or ion injection, rotating rack, X-ray and Optical machine. Ferrotec (China) provides multiple types of Hollow-shaft Seal Feedthrough such as Through-Hole and Flange type. Customized products with special design or design without clamps are also available.

Solid Ferrofluidic Seal Feedthroughs

We provide multiple types of solid ferrofluidic seal feedthroughs for all occasions such as: mini type, through-hole type, flange type, and heavy-load type. Except for the small-diameter shaft, the power assembly and the user’s mounting part of the shaft have a standard key slot. Besides, multiple combinations such as flat surface, threaded connection and hole connection can be customized designed and manufactured. Our standard metric seal feedthroughs are also applicable for occasions like high temperature, heave-load, and water-cooled form in high speed applications. (Except for some mini-sized and through-hole ferrofluidic seals.)

Ferrofluidic Vacuum Feedthroughs Features

Seal Ring

Rotary shaft is surrounded by ferrofluids which become a seal ring isolating air, moisture, smoke, etc., and it has almost no leakage. The leakage of the seal ring is too weak to be measured even by spectrum analyzer （1*10-11torre/sec）.

Long Service Life

The "liquid O-ring" consists of stable ferrofluids which can be used for 10 years without any maintenance.

Good Reliability

Seal ring is composed of permanent magnet structure and stable ferrofluids, so mechanical wear only occurs on bearings.

No Contamination

Since the seal ring is free of wear, no particle generated, which reduces the contamination of the whole system. The low air pressure also makes the seal ring easy to repair. The vacuum can be controlled at 8-10 Torr.

Optimum Torque
Transmission

Through-shaft construction permits 100% of the engineered torque transmission and provides in-phase rotation without backlash or slip errors.

Low Damping and
High-speed Rotation Capabilities

The extremely low viscosity of the ferrofluids and the contactless structure of seal ring and ferrofluids feeding device accomplish its stable operation and high-speed rotation.

Customizing Ferrofluidic Vacuum Feedthroughs

When there is a technical bottleneck due to product development, an unprecedented Vacuum Feedthrough may help to overcome the difficulties. Ferrrotec (China) is a customer-centric company. Our design and manufacturing capabilities ensure that products are designed for customer required application environments.